第19卷第8期 2011年8月
文章编号
1004-924X(2011)08-1944-06
光学精密工程
Optics and Precision Engineering
Vol.19No. 8
Aug.2011
提高光栅莫尔条纹信号质量的滤波方法
吴宏圣，，曾琪峰，乔栋，郭帮辉
（中国科学院长春光学精密机械与物理研究所，吉林长春130033）
摘要：针对莫尔条纹信号的质量间题提出一种相位差滤波法。将指示光栅上四场裂相方式中每场细分为多个不同相位的行组合，利用行组合间的不同相位排列关系来消弱高次谱波的分量，从而提高莫尔条纹信号的质量。首先，介绍了莫尔条纹的傅里叶级数表达式，对莫尔条纹的各次谱波特性进行了分析。然后，以指示光栅的图案设计为例，阐明该滤波方法消除二次、三次和四次谐波的过程。最后，通过仿真和实验，验证了该滤波方法对削弱高次谐波的有效性。实验结
变指示光栅的刻划图案，不增加制造成本和体积，实用性强，易于工业生产，关键调：莫尔条纹；相位差滤波；指示光栅；高次谱波
中图分类号：0436.1
文献标识码：A
doi; 10, 3788/OPE. 20111908. 1944
Filtering method of improving quality of grating Moire fringe
WUHong-sheng',ZENGQi-feng，QIAODong,GUOBang-hui(ChangchunInstituteof Optics，FineMechanics and Physics, ChineseAcademyofSciences,Changchun130033，China）
*Correspondingauthor,E-mail:wu9321@163.com
Abstract: A filtering method, phase-difference filtering, was presented to improve the quality of grat-ing Moire fringe, Each field of the 4 field scanning reticle was devided into multi-lines with different phases to suppress the high harmonic generations and to improve the signal quality of the Moire fringe. Firstly, the Fourier series expression of Moire fringe was introduced and various harmonic generations of the Moire fringe were analyzed. Then, the filtering method to eliminate the second, third and fourth harmonic generations was illustrated with the designed grating patterns, Finally, the validity of the method to inhibit the high harmonic generations was verified through simulations and experiments. Experimental results indicate that the third harmonic generation of the Moire fringe sig nal can be reduced by 4. 9% and the accuracy can be improved by 0. 5 μm with the period of 20 μm. The method is effective, low cost, without increasing the system size and easy to be used in industrial productions
Key words: Moire fringe; phase-difference filtering; scanning reticle; high harmonic generation
收稿日期：2010-12-06；修订日期：2011-01-15.
基金项目：吉林省科技厅资助项目（No.20106015）