第18卷第3期 2010年3月
1004-924X(2010)03-0646-07
文章编号
光学精密工程
Optics and Precision Engineering
基于高精度位移传感器的减振平台
宁大勇1.2，高云国1，刘稀凤3
（1.中国科学院长春光学精密机械与物理研究所，吉林长春130033；
2.中国科学院研究生院，北京100039；3.大连教育学院，辽宁大连116021）
Vol. 18No,3 Mar.2010
摘要：为了保证光学精密仪器工作基础的高稳定性，设计了一种新型的减报平台。该减振平台采用精度为10nm的位移传感器作为测量装置，通过位移传感器测量隔报平台支撑弹簧的长度变化，计算出支撑力的变化；然后，调整电磁驱动器的电磁力，使光学精密仪器受力平衡，达到减振的目的。理论及仿真分析表明，采用这种减振方式有很好的减振效果，同时，由于每级减振装置之间是被此独立的，这种减振方式更有利于多级减振。实验结果显示，基座振幅为0.22mm 时，减振台支撑面振幅为1.6μm；基座振幅为0,20mm时，减振台支择面振幅为1.4μm；基座振幅0.18tmm时，减振台支撑面报幅为1.2μm；基座振幅为0.15mm时，减振台支撑面振幅为1.0μm，表明该平台有效地起到了减振作用。
键词：位移传感器；减振平台；弹簧；电磁驱动器关
中图分类号：TH161.6；TP212,12
文献标识码：A
Vibrationisolationplatformbaseonhighaccuratedisplacementsensors
NING Da-yongl-2, GAO Yun-guo', LIU Xi-feng
(l.ChangchunInstituteof Optics,FineMechanicsand Physics, ChineseAcademy of Sciences,Changchun130033，China;
2.Graduate University of Chinese Academy of Sciences,Beijing 100039, China;
3.DalianInstituteofEducation，Dalian116021,China)
Abstract: A vibration isolation platform is designed for keeping the precise optical instrument to work accurately. By taking displacement sensors with an accuracy of 1o nm as measuring devices, the plat form calculates the changed force of the supporting spring by measuring the length change of the spring with the displacement sensor, then it adjusts the force of electromagnet actuator according to the changed force of spring to balance the precise optical instrument to isolate the vibration of base. According to the analysis of theory and simulation, it can satisfy the request of vibration isolation. Furthermore,this method is propitious to the multilevel reduce vibration, for each vibration isolation platform is independent. Experimental results indicate that when the vibration amplitudes of founda-tion are 0, 22,0.20,0.18 and o.15 mm, the vibration amplitudes of isolation vibration platform is 1.6, 1. 4,1. 2 and 1. O μm, respectively, which shows proposed method can satisfy the requirement of isola tionvibration.
Key words: displacement sensor; vibration isolation platform; spring; electromagnet actuator
收稿日期：2009-04-22；修订日期：2009-07-07.
基金项目：国家863高技术研究发展计划资助项目（No.2006AA04Z367）