第33卷第2期 2012年4月
热处理技术与装备
RECHUII JISHU YU ZHUANGREI
微晶/纳米金刚石复合涂层的沉积与表征
马玉平，朱绍峰”，袁根福
（1.安徽建筑工业学院机械与电气工程学院，安徽合肥230022： 2.安徽建筑工业学院材料与化学工程学院，安徽合肥230022）
Vol. 33,No.2 Apr,2012
·材料研究·
摘要：采用偏压增强热丝CVD(HFCVD)法，通过引入情性气体Ar，在经过甲醇新预处理方法处理后的硬质合金衬底表面成功沉积了微晶/纳米金刚石复合涂层。对金刚石复合涂层的表面形貌、成分、表面粗楚度进行了分析和研究。研究结果表明：新的预处理方法能够提高全刚石薄膜与衬底之间的附着强度。Ar的引入使得金刚石萍膜二次形核率更高，颗粒也更加细小，纳米全则石复合涂层不但具有高的附着强度，而且具有非常低的表面粗趋度。对于拓展纳米金刚石涂层在精密加工领域中的应用具有一定的作用。
关键词：纳米金刚石复合涂层；硬质合金；偏压增强热丝CVD；表面质量
中图分类号：TC156.99文献标识码：A
文章编号：1673=4971(2012)0203105
Fabrication andCharacterization of Microcrystalline/Nanocrystalline
DiamondCompositeCoating
MA Yu-ping",ZHU Shao-feng",YUAN Gen-fu'
(1. School of Mechanical and Electrical Engineering, Anhui Institute of Architecture and Industry , Hefei Anhui 230022, China; 2. School of Materials and Chemical Engineering, Anhui Institute of
Architecture and Industry, Hefei Anhui 230022, China)
Abstract: Microcrystalline/nanocrystalline diamond composite coating is successfully deposited on the WC-Co hard alloy substrate by a bias-enhanced hot filament CVD system in the inert gas Ar using methanol solution new pretreatment method for removing the Co in surface of substrate. The surface morphology, composition and surface roughness of diamond composite coating were observed and analyzed. The results show that the new pretreatment method can increases adhesive strength between diamond film and sub-strate, The introduction of Ar makes the second nucleation rate of diamond film higher and the diamond grains finer. Nanocrystalline diamond composite coating not only has good adhesive strength,but also has low surface roughness, It is certain effect for the nanocrystalline diamond coating widely applies in the pre-cision machining fields.
Key words: nanocrystallin diamond composite coating; hard alloy; bias-enhanced hot filament CVD; sur-face quality
0
引
金刚石薄膜具有十分接近天然金刚石的硬度、收稿日期：2012-01-10
高的弹性模量、极高的热导率、低的摩擦系数、低的热膨胀系数和化学稳定性以及极好的抗酸、抗碱、抗
作奢萬介：马玉平（1975-），男，博士，副敦授，主要从事金刚石涂屋理论及其应用、待种加工等研究。
联系电话：13856030739;Emeil;66840003@qq.com
资助项目：安数省教育厅项目（No、KJ2010B045）
万方数据